Electron and Ion Beam-Stimulated Solid Phase Regrowth of Phosphorus-Implanted Silicon

M. Miyao; A. Polman; R. van Kemp; W. Sinke; J. E. M. Westendorp; J. F. van der Veen; F. W. Saris

doi:https://doi.org/10.7567/SSDM.1986.B-10-4

[B-10-4] Electron and Ion Beam-Stimulated Solid Phase Regrowth of Phosphorus-Implanted Silicon

M. Miyao、A. Polman、R. van Kemp、W. Sinke、J. E. M. Westendorp、 J. F. van der Veen、F. W. Saris (1.Central Research Laboratory, Hitachi Ltd.、2.FOM-Institute for Atomic and Molecular Physics、3.Phys. Lab. University of Amsterdam)

https://doi.org/10.7567/SSDM.1986.B-10-4

1986 International Conference on Solid State Devices and Materials

[B-10-4] Electron and Ion Beam-Stimulated Solid Phase Regrowth of Phosphorus-Implanted Silicon