The Japan Society of Applied Physics

[B-10-4] Electron and Ion Beam-Stimulated Solid Phase Regrowth of Phosphorus-Implanted Silicon

M. Miyao, A. Polman, R. van Kemp, W. Sinke, J. E. M. Westendorp, J. F. van der Veen, F. W. Saris (1.Central Research Laboratory, Hitachi Ltd., 2.FOM-Institute for Atomic and Molecular Physics, 3.Phys. Lab. University of Amsterdam)