[B-11-1] Orientation Control of SOI Film by Laser Recrystallization

K. Sugahara、S. Kusunoki、Y. Inoue、T. Nishimura、Y. Akasaka (1.LSI Research and Development Laboratory Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.1986.B-11-1