[B-11-5] Planarized Growth of Ge Overlayers on CaF2/Si Structures by Electron Beam Exposure to Predeposited Layers

Seigo KANEMARU, Hiroshi ISHIWARA, Seijiro FURUKAWA (1.Graduate School of Science and Engineering, Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.1986.B-11-5