[B-5-5] High-Speed Self-Aligned Polysilicon Emitter/Base Bipolar Devices Using Boron and Arsenic Diffusion Through Polysilicon

H. Park, T. Yamaguchi, K. Boyer, G. Eiden, C. Clawson, S. Yu, J. Sachitano (1.Tektronix Laboratories, Tektronix, Inc.)

https://doi.org/10.7567/SSDM.1986.B-5-5