[B-9-3] The Effects of Ions on the Formation of Polysilicon Films

A. Kawamura、J. Kudo、K. Iguchi、Y. Kubota、H. Sato、M. Koba、K. Awane (1.Central Research Laboratories, SHARP Corporation)

https://doi.org/10.7567/SSDM.1986.B-9-3