[B-9-3] The Effects of Ions on the Formation of Polysilicon Films

A. Kawamura, J. Kudo, K. Iguchi, Y. Kubota, H. Sato, M. Koba, K. Awane (1.Central Research Laboratories, SHARP Corporation)

https://doi.org/10.7567/SSDM.1986.B-9-3