[C-3-4] Selective Double Diffusion of Zn and Si into GaAs Using Sputtered Si Masks

E. Omura, G. A. Vawter, X. S. Wu, L. A. Coldren, J. L. Merz (1.Department of Electrical and Computer Engineering University of California)

https://doi.org/10.7567/SSDM.1986.C-3-4