[C-7-6] Selective Growth of GaAs by Reduced Pressure MOCVD Using TMG and TEG

Takashi Ueda, Sachiko Onozawa, Yoshihiro Kawarada, Masahiro Akiyama, Katsuzo Kaminishi (1.Research Laboratory, OKI Electric Industry Co., Ltd.)

https://doi.org/10.7567/SSDM.1986.C-7-6