[C-9-2] Control of Compositional Disordering of AlAs/GaAs Superlattice by Ar Ion Implantation

M. KAWABE, Y. IKEDA, N. SHIMIZU, K. MANNAMI, Y. NANNICHI (1.Institute of Materials Science, University of Tsukuba)

https://doi.org/10.7567/SSDM.1986.C-9-2