[D-10-5] Superlattice Structure a-Si Films Prepared by Photo-CVD Method and Their Application to a-Si Solar Cells.

H. Tarui, T. Matsuyama, S. Tsuda, Y. Hishikawa, T. Takahama, S. Nakayama, N. Nakamura, T. Fukatsu, S. Nakano, M. Ohnishi, Y. Kuwano (1.Research Center, Applied Research Center, SANYO Electric Co., Ltd.)

https://doi.org/10.7567/SSDM.1986.D-10-5