[D-4-2] Direct Recoil Time-of-Flight Technique: In Situ Analysis of H, C, N, and O on Si(100) and Polyimide Surface

Shin'ichi Tachi, J. Albert Schultz, Yang-Sun Jo, J. Wayne Rabalais (1.Central Research Laboratory, Hitachi ltd., 2.University of Houston)

https://doi.org/10.7567/SSDM.1986.D-4-2