[D-5-2] Investigation on Microarea Stress in Silicon by Microprobe Raman Spectroscopy

S. Kambayashi、T. Hamasaki、T. Nakakubo、M. Watanabe、H. Tango (1.Toshiba Corp. VLSI Research Center, Total Information System Div.)

https://doi.org/10.7567/SSDM.1986.D-5-2