[D-5-4] Atomic Terraces and Steps on (100) Silicon Surfaces Observed by Reflection Electron Microscopy

N. Inoue, Y. Tanishiro, K. Yagi (1.NTT Electrical Communications Laboratories, 2.Physics Department, Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.1986.D-5-4