[B-4-2] Observation of Nonradiative Microdefects in GaAs Wafers with a New Photo-Thermal-Radiation Microscope

Kazuo TSUBOUCHI, Yoshikazu AKUTSU, Nobuo MIKOSHIBA (1.Research Institute of Electrical Communication, Tohoku University)

https://doi.org/10.7567/SSDM.1987.B-4-2