[B-9-1LN] Chloride VPE of AlxGa1-xAs by the Hydrogen Reduction Method Using a Metal Al Source

F. Hasegawa、K. Katayama、R. Kobayashi、H. Yamaguchi、Y. Nannichi (1.Institute of Materials Science, University of Tsukuba)

https://doi.org/10.7567/SSDM.1987.B-9-1LN