[B-9-3LN] Fabrication of Narrow Two-Dimensional Electron Gas Channels in GaAs/AlGaAs Sidewall Interfaces by Selective Growth

Hiromitsu Asai, Syoji Yamada, Takashi Fukui (1.NTT Electrical Communications Laboratories)

https://doi.org/10.7567/SSDM.1987.B-9-3LN