[C-1-3] Seed Shape Dependence of Si Solid Phase Epitaxy

Eiichi Murakami, Masahiro Moniwa, Kikuo Kusukawa, Masanobu Miyao, Terunori Warabisako, Yasuo Wada (1.Central Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1987.C-1-3