[C-1-3] Seed Shape Dependence of Si Solid Phase Epitaxy

Eiichi Murakami、Masahiro Moniwa、Kikuo Kusukawa、Masanobu Miyao、Terunori Warabisako、Yasuo Wada (1.Central Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1987.C-1-3