[C-1-5] Selective Growth of Nuclei on Amorphous Substrates

T. Yonehara、Y. Nishigaki、H. Mizutani、S. Kondoh、K. Yamagata、T. Ichikawa (1.Research Center, Canon Inc.)

https://doi.org/10.7567/SSDM.1987.C-1-5