[C-1-5] Selective Growth of Nuclei on Amorphous Substrates

T. Yonehara, Y. Nishigaki, H. Mizutani, S. Kondoh, K. Yamagata, T. Ichikawa (1.Research Center, Canon Inc.)

https://doi.org/10.7567/SSDM.1987.C-1-5