[C-3-4] Through-Oxide Cleaning of Silicon Surface by Photo-Excited Radicals

Rinshi Sugino, Yasuo Nara, Tatsuya Yamazaki, Satoru Watanabe, Takashi Ito (1.FUJITSU LABORATORIES LTD., Atsugi)

https://doi.org/10.7567/SSDM.1987.C-3-4