[C-3-5] Formation of Inter-Poly Si Dielectrics by Rapid Thermal Processing

Natsuo AJIKA, Masahiro SHIMIZU, Katsuhiro TSUKAMOTO, Makoto HIRAYAMA, Takayuki MATSUKAWA (1.Mitsubishi Electric Corp. LSI R and D Lab.)

https://doi.org/10.7567/SSDM.1987.C-3-5