The Japan Society of Applied Physics

[C-8-1] Depth Measurement Techniques for Silicon Trenches

Tokuo Kure, Tsutomu Komoda, Minori Noguchi, Hideo Sunami, Tetsuya Hayashida (1.Central Research Laboratory, Hitachi Ltd., 2.Production Engineering Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1987.C-8-1