Depth Measurement Techniques for Silicon Trenches

Tokuo Kure; Tsutomu Komoda; Minori Noguchi; Hideo Sunami; Tetsuya Hayashida

doi:https://doi.org/10.7567/SSDM.1987.C-8-1

1987 Conference on Solid State Devices and Materials

1987年8月25日〜 1987年8月27日
Nippon Toshi Center, Tokyo, Japan

[C-8-1] Depth Measurement Techniques for Silicon Trenches

Tokuo Kure、Tsutomu Komoda、Minori Noguchi、Hideo Sunami、Tetsuya Hayashida (1.Central Research Laboratory, Hitachi Ltd.、2.Production Engineering Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1987.C-8-1

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