Depth Measurement Techniques for Silicon Trenches

Tokuo Kure; Tsutomu Komoda; Minori Noguchi; Hideo Sunami; Tetsuya Hayashida

doi:https://doi.org/10.7567/SSDM.1987.C-8-1

[C-8-1] Depth Measurement Techniques for Silicon Trenches

Tokuo Kure, Tsutomu Komoda, Minori Noguchi, Hideo Sunami, Tetsuya Hayashida (1.Central Research Laboratory, Hitachi Ltd., 2.Production Engineering Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1987.C-8-1

1987 Conference on Solid State Devices and Materials

[C-8-1] Depth Measurement Techniques for Silicon Trenches