[C-8-5] Stress Measurement of LOCOS Structure using Microscopic Raman Spectroscopy

K. Kobayashi、Y. Inoue、T. Nishimura、T. Nishioka、H. Arima、M. Hirayama、T. Matsukawa (1.LSI Research and Development Lab., Mitsubishi Electric Corp.)

https://doi.org/10.7567/SSDM.1987.C-8-5