[C-8-5] Stress Measurement of LOCOS Structure using Microscopic Raman Spectroscopy

K. Kobayashi, Y. Inoue, T. Nishimura, T. Nishioka, H. Arima, M. Hirayama, T. Matsukawa (1.LSI Research and Development Lab., Mitsubishi Electric Corp.)

https://doi.org/10.7567/SSDM.1987.C-8-5