[C-8-6] Micro Area Stress around Trench Structure

S. NADAHARA、S. KAMBAYASHI、M. WATANABE、T. NAKAKUBO (1.VLSI Research Center, Toshiba Corporation、2.Total Information System Div., Toshiba Corporation)

https://doi.org/10.7567/SSDM.1987.C-8-6