1987 Conference on Solid State Devices and Materials
Aug 25, 1987 - Aug 27, 1987 Nippon Toshi Center, Tokyo, Japan
[C-8-6] Micro Area Stress around Trench Structure
S. NADAHARA, S. KAMBAYASHI, M. WATANABE, T. NAKAKUBO (1.VLSI Research Center, Toshiba Corporation, 2.Total Information System Div., Toshiba Corporation)
