[S-III-11] Electron Spectroscopy Study of CI/Si Reaction on Si(111), Si(100) and Si(110) Surfaces

Nahomi AOTO, Eiji IKAWA, Yukinori KUROGI (1.Microelectronics Research Laboratories, NEC Corporation)

https://doi.org/10.7567/SSDM.1987.S-III-11