[S-III-3] Micro RBS Analysis by Focused 1.5MeV Ion Beam

A. KINOMURA, K. MATSUNAGA, K. INOUE, M. IZUMI, M. TAKAI, K. GAMO, S. NAMBA, M. KIUCHI, M. SATOU (1.Faculty of Engineering Science, Osaka University, 2.Government Industrial Research Institute Osaka)

https://doi.org/10.7567/SSDM.1987.S-III-3