[S-III-3] Micro RBS Analysis by Focused 1.5MeV Ion Beam

A. KINOMURA、K. MATSUNAGA、K. INOUE、M. IZUMI、M. TAKAI、K. GAMO、S. NAMBA、M. KIUCHI、M. SATOU (1.Faculty of Engineering Science, Osaka University、2.Government Industrial Research Institute Osaka)

https://doi.org/10.7567/SSDM.1987.S-III-3