[S-III-5] Growth of AlGaAs by Atomic Layer Epitaxy using a Pulsed Vapor Phase Method

M. Ozeki, N. Ohtsuka, K. Mochizuki, K. Kodama (1.Fujitsu Laboratories Ltd. Atsugi)

https://doi.org/10.7567/SSDM.1987.S-III-5