[A-1-4] Thermal Stability Studies on Copper Thin Films Formed by a Low-Kinetic-Energy Particle Process

Tatsuyiki Saito, Tadahiro Ohmi, Tadashi Shibata, Masahito Otsuki, Takahisa Nitta (1.Department of Electronics, Faculty of Engineering Tohoku University, 2.Device Development Center, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1989.A-1-4