[A-2-4] Blanket CVD-W Formed by SiH4 Reduction of WF6 on TiN for Planar Interconnection

M. Iwasaki, H. Itoh, T. Katayama, K. Tsukamoto, Y. Akasaka (1.LSI R&D Lab., Mitsubishi Electric Corp.)

https://doi.org/10.7567/SSDM.1989.A-2-4