[A-3-5] Abrupt and Defect-Free p+-n+ Junction Formed by Low-Temperature Photo-Epitaxy with Continuous Boron and Phosphorous Doping

Tatsuya Yamazaki, Hiroshi minakata, Takashi Ito (1.Fujitsu Laboratries Ltd.)

https://doi.org/10.7567/SSDM.1989.A-3-5