The Japan Society of Applied Physics

[A-8-1] A New Insight into the PN-Junction Characteristics of ULSI -The Time Dependent Junction Breakdown (TDJB)-

Hideyuki MATSUOKA, Digh HISAMOTO, Ryuichi IZAWA, Eiji TAKEDA (1.Central Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1989.A-8-1