[B-2-3] A Study of Nucleation and Grain Growth in Silicon Implanted a-Silicon Films

Shigeru Kambayashi、Shinji Onga、Ichiro Mizushima、Katsuhiko Higuchi、Hiroshi Kuwano (1.ULSI Research Center, Toshiba Corporation、2.Faculty of Science and Technology, Keio University)

https://doi.org/10.7567/SSDM.1989.B-2-3