[B-2-3] A Study of Nucleation and Grain Growth in Silicon Implanted a-Silicon Films

Shigeru Kambayashi, Shinji Onga, Ichiro Mizushima, Katsuhiko Higuchi, Hiroshi Kuwano (1.ULSI Research Center, Toshiba Corporation, 2.Faculty of Science and Technology, Keio University)

https://doi.org/10.7567/SSDM.1989.B-2-3