[B-2-6] Chemical State and Diffusion Behavior of As in Arsenosilicate Glass (AsSG)

Yoshitaka TSUNASHIMA、Takako OKADA、Hideichi KAWAGUCHI、Shinji ONGA、Kikuo YAMABE (1.ULSI Research Center, TOSHIBA Co.)

https://doi.org/10.7567/SSDM.1989.B-2-6