[C-2-1] Development of Scanning μ-RHEED Microscopy for Imaging Poly-Crystal Grain Structure in LSI

Kazuo TSUBOUCHI、Kazuya MASU、Msanori TANAKA、Yohei HIURA、Tadahiro OHMI、Nobuo MIKOSHIBA、Shigeki HAYASHI、Takao MARUI、Akira TERAMOTO、Tetsuo KAJIKAWA、Hiroyoshi SOEJIMA (1.Research Institute of Electrical Communication, Tohoku University、2.Department of Electronics, Faculty of Engineering, Tohoku University、3.Shimadzu Corporation)

https://doi.org/10.7567/SSDM.1989.C-2-1