[C-4-3] Determination of Strain and Strain-Profiles in III-V Semiconductor Hetero-Epitaxial Films Using a Beam-Modulation Spectroscopy

Koshi ANDO, Akinori KATSUI, Chihiro HAMAGUCHI (1.NTT Opto-Electronics Laboratories, 2.Faculty of Engineering, Osaka University)

https://doi.org/10.7567/SSDM.1989.C-4-3