[D-1-2] Low Temperature Preparation of High-Tc Superconducting Thin Films by Reactive Sputtering Using N2O Gas

Michihiro MIYAUCHI, Kentaro SETSUNE, Kiyotaka WASA (1.Central Research Laboratories, Matsushita Electric Industrial Co., Ltd.)

https://doi.org/10.7567/SSDM.1989.D-1-2