The Japan Society of Applied Physics

[S-B-1] Optical Absorption in Ultrathin Silicon Oxide Film

N. Miyata、K. Moriki、M. Fujisawa、M. Hirayama、T. Matsukawa、Takeo Hattori (1.Musashi Institute of Technology、2.The Institute for Solid State Physics, The University of Tokyo、3.LSI Research and Development Laboratory, Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.1989.S-B-1