[S-B-12] Outgas-Free, Corrosion-Free Metal Surfaces for ULSI Manufacturing

K. Sugiyama、T. Ohmi、N. Miki、Y. Nakahara (1.Department of Electronics, Faculty of Engineering, Tohoku University、2.R&D Division, Hashimoto Chemical Ltd.、3.Technical Center, Osaka Sanso Kogyo Co., Ltd.)

https://doi.org/10.7567/SSDM.1989.S-B-12