[S-B-7] A Non-Destructive Surface and Interface Study of Very-Thin-Film/Substrate Contact Systems Using Soft X-ray Spectroscopy

Motohiro IWAMI、Masaaki HIRAI、Masahiko KUSAKA、Hatsuo NAKAMURA、Fumio AKAO (1.Research Laboratory for Surface Science, Faculty of Science, Okayama University、2.Osaka Electro-Communication University、3.Department of Electronic Engineering, Okayama University of Science)

https://doi.org/10.7567/SSDM.1989.S-B-7