Semiconductor Interface and Surface Structure Studies by Means of Grazing Incidence X-Ray Diffraction

Koichi AKIMOTO; Jun'ichiro MIZUKI; Ichiro HIROSAWA; Junji MATSUI

doi:https://doi.org/10.7567/SSDM.1989.S-E-2

[S-E-2] Semiconductor Interface and Surface Structure Studies by Means of Grazing Incidence X-Ray Diffraction

Koichi AKIMOTO、Jun'ichiro MIZUKI、Ichiro HIROSAWA、Junji MATSUI (1.Fundamental Research Laboratories, NEC Corporation、2.Research and development Group, NEC Corporation)

https://doi.org/10.7567/SSDM.1989.S-E-2

1989 Conference on Solid State Devices and Materials

[S-E-2] Semiconductor Interface and Surface Structure Studies by Means of Grazing Incidence X-Ray Diffraction