[B-3-3] Application of Hydrogenation to Improve GaAs/Si MESFETs and IC Performance by PECVD SiN

Mingxiang Li, Qingyi Tong, Gang Zou, J. Deboeck, M. Von Rossum, G.J. Declerck (1.Microelectronics Center, Southeast University, 2.IMEC)

https://doi.org/10.7567/SSDM.1990.B-3-3