[B-3-3] Application of Hydrogenation to Improve GaAs/Si MESFETs and IC Performance by PECVD SiN

Mingxiang Li、Qingyi Tong、Gang Zou、J. Deboeck、M. Von Rossum、G.J. Declerck (1.Microelectronics Center, Southeast University、2.IMEC)

https://doi.org/10.7567/SSDM.1990.B-3-3